Abstract: We will prepare good crystalline and strong photoluminescence Er silicate thin films materials, optimize process parameters, propose the growth mechanism of Er silicate, and study the effect of phase transitions and defects of Er silicate on Er3+ photoluminescence. Fabricate the Er silicate optical waveguide amplifier by using Electron beam lithography machine such EBL, FIB, RIE machine, and get optimal micro-machining process parameters. Develop 10dB/cm gain of Er silicate optical waveguide amplifier for silicon photonics integration


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