[Table Adjustment]
[Table Adjustment] Georgia Tech Microelectronics Research Center
CMOS as a Research Platform
Baselines 
 
Baselines
20um ChemFET
2.5um P-well
1.3um N-well
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Baselines

Three baselines, hosted in a 7,000sq. ft. class 10-100 cleanroom and capable of 4"-6" wafer production, have been established at the Microelectronics Research Center:

The baselines include process simulation, circuit design, mask generation, a set of processing equipment and recipes, and a set of test and measurement instruments. The processing equipment includes horizontal diffusion furnaces, MA-6 mask aligner, sputterers, spin coaters, RCA clean station, rinse and dryer, pattern generator, stepper, ICP etcher, RIEs, PECVDs, evaporators, and a Hitachi S-3500H SEM.